OPTICAL MEASURING AND LASER TECHNOLOGIES FOR SCIENTIFIC AND INDUSTRIAL APPLICATIONS

Yu. V. Chugui, A. G. Verkhoglyad, P. S. Zavyalov, E. V. Sysoev, R. V. Kulikov, M. A. Zavyalova, A. G. Poleshchuk, V. P. Korolkov

Abstract

Modern industry and science take novel 3D optical measuring systems and laser technologies with micro-/nanometer resolution for solving actual problems. Such systems, including the 3D dimensional inspection of ceramic parts for electrotechnical industry and 3D superresolution low-coherent micro-/nanoprofilometers are presented. New approach for the formation of 3D laser templates for large-sized objects such as antennas using diffractive optics is presented. The newest results in the field of laser technologies for high-precision synthesis of microstructures by updated image generator using the semiconductor laser are presented. The measuring systems and the laser image generator developed and produced by TDI SIE and IAE SB RAS have been tested by customers and used in different branches of industry and science.

Keywords

3d optical inspection, low-coherent, diffractive optical element, pico resolution

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DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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