CALIBRATION OF INVAR ANGULAR INTERFEROMETER OPTICS WITH MULTI-STEP METHOD

Yao Huang, Zi Xue, He Yan Wang

Abstract

In National Institute of Metrology, China (NIM), the Small Angle Measuring System which is based on sine principle, is developed as the national primary standard for the plane angle in the angular measuring range ±5°. The measurement uncertainty of this system is dominated by the accuracy of an Invar Angular Interferometer Optics. To calibrate this Invar Interferometer system, a series of known reference standards were given with multi-step method using a double-deck rotary table. The calibration got an uncertainty lower than 0.03 arcsec (<i>k</i> = 2).

Keywords

calibration, angle measuring, invar angular interferometer optics, multi-step method

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IMEKO-TC14-2014-26.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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