CORRECTION OF SYSTEMATIC ERRORS IN THE STEP-HEIGHT MEASUREMENT WITH OPTICAL SURFACE PROFILERS

Rainer Tutsch, Hanno Dierke

Abstract

Optical instruments are frequently used for surface topography measurement. In general their working principles can be divided into interferometric (e.g. white-light interferometers) and focus sensing (e.g. confocal microscopy) techniques. For both groups a number of systematic error sources are well known. In this paper we will concentrate on step-height measurement and take a closer look at those errors that are caused by the material properties of the workpiece, as there are: material-dependent phase-jumps on reflection, phase- and focus-shift caused by transparent layers and the effects of volume scattering. We describe these effects and give suggestions for procedures to correct these errors. Based on the results of this work the standardization organization DIN in Germany is currently preparing a draft standard DIN 32567.

Keywords

optical surface profilers, error correction, step height measurement

Download

IMEKO-TC14-2014-43.pdf

DOI

-

IMEKO TC

TC14 - Measurement of Geometrical Quantities

Back to the proceedings