RECENT DEVELOPMENTS OF THE 3D FIBER PROBE

Ulrich Neuschaefer-Rube, Holger Bremer, Benjamin Hopp, Ralf Christoph

Abstract

The fiber probe is well known in micro-coordinate metrology. The 2D version has been used for many years to measure injector nozzles, turbine blade cooling holes, and a variety of other small, tight tolerance features. A development of this probe, the 3D fiber probe, has been commercially available for some time. <BR />In a cooperation project, PTB and Werth Messtechnik have continued investigations on this microprobe. This paper reports on the recent achievements. Very small stylus tips with diameters down to 25 µm with isotropic stiffness and novel probe designs are now possible. Dual-sphere and L-shaped styli have opened new applications for holes with large aspect ratios and recessed features. Scanning tests have resulted in form deviations below 0.4 µm. <BR />This paper explains the operating principle, reports on test results and describes some of the applications.

Keywords

coordinate metrology, microprobe, tactile-optical probe, WFP 3D, 3D fiber probe

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DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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