CALIBRATOR FOR 2D GRID PLATE USING VISION COORDINATE MEASURING MACHINE WITH LASER INTERFEROMETERS

Mariko Kajima, Tsukasa Watanabe, Makoto Abe, Toshiyuki Takatsuji

Abstract

A calibrator for 2D grid plate based on a commercial vision coordinate measuring machine (vision-CMM) was developed. A laser interferometer for calibration of <i>x</i> coordinate and two laser interferometers for calibration of <i>y</i> coordinate were attached on the vision-CMM. By applying multi step measurement method for the calibration procedure, the dimensional error in the calibrator could be reduced. The calibration uncertainty for 2D grid plate using developed calibrator could be estimated as sub-micrometer level.

Keywords

grid plate, vision coordinate measuring machine, laser interferometer

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DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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