DEVELOPMENT OF HIGH ACCURATE GEAR ARTIFACT MEASURING INSTRUMENT BASED ON LASER INTERFEROMETRY
Abstract
A specialized high accurate gear artifact measuring instrument based on laser interferometry is developed in National Institute of Metrology (NIM, China), to fulfill the increasing demand for high accurate calibration of gear artifacts. This measuring instrument mainly consists of three linear guide rails, a rotary table, a 3D scanning probe and a laser measuring system. In the laser measuring system, laser beam from laser head is splited along two paths, one is arranged tangent to the base circle of gear for the measurement of profile deviation, another is arranged parallel to the gear axis for the measurement of helix deviation, both laser measurement performed with a resolution of 0.3nm. To minimize the influence of Abbe error, two cube-corner reflectors are placed close to the tip of probe. This measuring instrument operated automatically, during the measurement of gear artifact, all the signals from guide rails, rotary table, probe and laser measuring system are obtained synchronously. A software collects all the data for further calculation and evaluation. Development of this instrument makes it possible to guarantee the measurement of profile and helix direct traceable to the standard laser wavelength.
Event details
- Event
- TC14 LMPMI Symposium 2014
- Technical Committee
- TC14
- Place
- Tsukuba, JAPAN
- Time
- 3 September 2014 - 5 September 2014
- Website
- http://www.lmpmi2014.jp/