THREE MOIRÉ TECHNIQUES UNDER A LASER SCANNING MICROSCOPE FOR MICRON/SUBMICRON-SCALE DEFORMATION MEASUREMENT

Qinghua Wang, Hiroshi Tsuda, Satoshi Kishimoto, Yoshihisa Tanaka, Yutaka Kagawa

Abstract

Three Moiré techniques based on a laser scanning microscope (LSM) were presented and compared for the first time, including the LSM scanning moiré method, our developed LSM overlapping moiré method, and our newly developed LSM secondary moiré method. The formation principles of these moiré patterns and the measurement principles for deformation measurement were introduced. The applicable conditions of these three techniques were analyzed. Some typical moiré fringes on a strain gauge, carbon fiber reinforce plastics, a polyimide film and a silicon wafer were illustrated. Our developed LSM overlapping moiré method and secondary moiré method are effective in eliminating the scanning distortion of the LSM. These three kinds of moiré techniques are able to expand the application range of the LSM in deformation measurement at the micron and the submicron scales.

Keywords

laser scanning microscope, Moiré, overlapping, secondary, deformation

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DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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