3D IMAGE FORMATION IN TRANSMITTED PARTIALLY COHERENT AND INCOHERENT LIGHT APPLIED TO DIMENSIONAL INSPECTION

Yu. V. Chugui, E. S. Senchenko

Abstract

The peculiarities of 3D objects image formation with clear shadow projection under their illumination by partially coherent and perfectly incoherent light based on the constructive theory of 3D objects formation are investigated. Threshold algorithms for determining the position of 3D object geometric boundary, taking into account its thickness, the light source angular size and the projection system angular aperture are developed. These algorithms are based on the application of true (calculated) threshold or standard one using the corrective component for threshold. The cases of weak and strong 3D object volumetricity for partially coherent and incoherent illumination are studied. The analytical equations for these algorithms are given. It has been shown that their use can significantly improve the measurement accuracy of extended objects.

Keywords

3D diffraction, shadow method, dimensional inspection, partially coherent light

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IMEKO-TC14-2014-77.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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