A FLEXIBLE THREE-AXIAL FORCE MEASURING ARRAY FOR TACTILE SENSING APPLICATIONS

Min-Seok Kim, Jin-Seok Jang, Yon-Kyu Park, Han-Wook Song

Abstract

We report a high-performance flexible tactile sensor capable of measuring 3-axial forces, which consists of an array with a size of 8 × 8 integrated in an area of 10 mm². Each cell has four strain gauges to detect 3-axial forces. The strain gauge is made of an inorganic silicon membrane. We fabricated the tactile sensor through a combination of a conventional batch micromachining process and a dry-transfer-printing technique. The fabricated tactile sensor showed a repeatable error less than 1 %, a minimum detectable force better than 0.5 g and a minimal crosstalk among 3-axial forces.

Keywords

force sensor, array, tactile sensor, flexible, 3-axis

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IMEKO-WC-2015-TC3-049.pdf

DOI

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IMEKO TC

TC3 - Measurement of Force, Mass, Torque, and Gravity

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