DETERMINATION OF AFM-CANTILEVER SPRING CONSTANTS USING THE TU ILMENAU FORCE DISPLACEMENT MEASUREMENT DEVICE

Christian Diethold, Michael Kühnel, Tzvetan Ivanov, Ivo W. Rangelow, Thomas Fröhlich

Abstract

This paper discusses the determination of spring constants of AFM-cantilevers using a force displacement measurement device based on electromagnetic force compensated (EMFC) load cells. <BR />The EMFC load cell was modified to utilize it as a combined displacement and force measurement device enabling the possibility to determine the spring constant of AFM-cantilevers with one sensor without the need of an additional displacement setting stage. <BR />The paper focuses on the determination of spring constants and the determination of the measurement uncertainty, which is down to 2.75 %.

Keywords

spring constant, AFM-cantilever, force measurement, EMFC load cell

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IMEKO-WC-2015-TC3-055.pdf

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IMEKO TC

TC3 - Measurement of Force, Mass, Torque, and Gravity

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