IMPROVEMENT IN LONG TERM STABILITY OF THE LONG RANGE AFMS

Nataliya Vorbringer-Dorozhovets, Eberhard Manske

Abstract

Long range AFMs suffer mainly from drift due to the relative long measurement times and from tip wear due to the large measured distances. After investigations of the long term stability of the AFMs, in this work, the recommendations for planning and realization of the long range measurements are proposed.

Keywords

AFM, long range AFM, nanopositioning and nanomeasuring machine, NPM machine, long distance measurements

Download

IMEKO-WC-2015-TC6-176.pdf

DOI

-

IMEKO TC

TC6 - Digitalization

Back to the proceedings