AN OPTICAL CALIBRATION METHOD FOR A DOUBLE-SLIT INTERFEROMETER CAPABLE OF INSPECTING THICKNESS VARIATION OF MOVING GLASS PANELS

Chu-Shik Kang, Jong-Ahn Kim, Jae Wan Kim, Jonghan Jin

Abstract

A double-slit interferometer capable of inspecting thickness variation of a moving glass panel with nanometric resolution, and its calibration method using a partly electrode-coated nematic liquid crystal cell are presented.

Keywords: double-slit, interferometer, thickness variation, calibration, liquid crystal
Download: IMEKO-WC-2015-TC14-295.pdf
DOI: -
IMEKO TC: TC14 - Measurement of Geometrical Quantities

Event details

Event: XXI IMEKO World Congress
Place: Prague, CZECH REPUBLIC
Time: 30 August 2015 - 4 September 2015
Website: http://imeko2015.org/

Back to the proceedings