SELF-CALIBRATION FOR OPTICAL PATH LENGTH OF 3D NANOPROFILER CONSIDERING RANDOM ERROR

Ryota Kudo, Kohei Okuda, Kenya Okita, Yusuke Tokuta, Shun Nakatani, Motohiro Nakano, Kazuya Yamamura, Katsuyoshi Endo

Abstract

In 3D nanoprofiler we develop, the optical path length is the largest uncertainty factor. As a method for self-calibration of the optical path length, we propose a method of utilizing a known optical path length shift. Results of simulation considering the random error, the accuracy was found to be dependent on 3 parameters. Similar characteristics is confirmed by experiment. Optical path length has been determined by the order of under four digits.

Keywords

nanoprofiler, self-calibration, optical path length, direct measurement, free-form

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IMEKO-WC-2015-TC14-296.pdf

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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