FABRICATION OF AN ULTRA-SMALL-DIAMETER OPTICAL FIBER PROBE FOR 3-D MICRO METROLOGY

Hiroshi Murakami, Akio Katsuki, Takao Sajima, Mitsuyoshi Fukuda, Masaki Okada, Megumu Nagaura

Abstract

This paper presents a system for 3D micro structure measurement using an optical fiber probe. A stylus shaft with a diameter of 0.4 µm was fabricated using an acid-etch technique and the characteristics of the stylus shaft in the process of displacement detection were described. The deformation of the stylus tip caused by the contraction of the ultraviolet curing resin, which was used to glue the stylus shaft to the stylus sphere, was analyzed by a finite element method.

Keywords

microstructure, measurement, optical fiber probe, laser diode, CMM

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IMEKO-WC-2015-TC14-305.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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