COMPARATIVE ANALYSIS OF SURFACE ROUGHNESS MEASUREMENTS OBTAINED WITH THE USE OF CONTACT STYLUS PROFILOMETRY AND COHERENCE SCANNING INTERFEROMETRY

Stanisław Adamczak, Jacek Świderski, Stępień Krzysztof, Tomasz Dobrowolski, Ireneusz Piotr Chmielik

Abstract

The paper presents comparison of measurements of geometrical surface structure obtained by the contact stylus profilometer and an optical profilometer applying a coherence scanning interferometry method. The measurements were performed on type D1 roughness etalon.

Keywords

surface texture measurement, contact stylus scanning, coherence scanning interferometry

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IMEKO-WC-2015-TC14-316.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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