CALIBRATION OF A WHITE-LIGHT INTERFEROMETER WITH A USE OF MATERIAL MEASURES RECOMMENDED BY ISO 25178 SERIES: RELIABILITY AND UNCERTAINTY

Marta Wiśniewska, Sabina Żebrowska-Łucyk

Abstract

There is a discrepancy between rapid pace of introducing more and more sophisticated white-light interferometers and a tardy tempo of developing proper calibration procedures applicable to these machines. Therefore, the authors evaluated both repeatability and credibility of calibration results obtained with a use of PGR and PPT calibration standards recommended by ISO 25178 series. The outcomes of the research, as well as limitations of the calibration artefacts usefulness, are presented in the paper.

Keywords

areal surface metrology, calibration, white-light interferometer

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IMEKO-WC-2015-TC14-319.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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