METROLOGICAL PERFORMANCE OF INTEGRATED MULTIPLE AXIS MEMS ACCELEROMETERS UNDER THERMAL EFFECT

Tamara G. Nesterenko, Evgeniy S. Barbin, Aleksey N. Koleda, Alisa A. Arshinova

Abstract

Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.

Keywords

MEMS-based accelerometer, thermal errors, moving mass, temperature sensitivity, elastic suspension

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IMEKO-WC-2015-TC22-435.pdf

DOI

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IMEKO TC

TC22 - Vibration Measurement

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