SIMULTANEOUS 3-AXIS MEMS ACCELEROMETER PRIMARY CALIBRATION: DESCRIPTION OF THE TEST-RIG AND MEASUREMENTS

Alessandro Schiavi, Fabrizio Mazzoleni, Alessandro Germak

Abstract

A procedure and a method for simultaneous 3-axis accelerometer primary calibration is presented. Nowadays, in the field of vibration monitoring, a relevant increase and diffusion of «low-cost» three-axial accelerometers (e.g. MEMS and NEMS) has been observed. The increased demand for calibration of MEMS and NEMS accelerometers and their inherent «low-accuracy», presupposes the opportunity to simplify the traditional calibration of triaxial accelerometers, as stated in Standard ISO 16063-21.

Keywords

primary calibration, vibration, triaxial MEMS/NEMS accelerometer

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IMEKO-WC-2015-TC22-438.pdf

DOI

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IMEKO TC

TC22 - Vibration Measurement

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