The control system of primary oscillation for micromechanical gyroscope

Pavel Baranov, Tamara Nesterenko, Edvard Tsimbalist, Evgenij Barbin, Aleksej Koleda, Sergej Vtorushin

Abstract

The mode of primary oscillations of micromechanical gyroscopes sensor is provided by the electrostatic comb-drive actuator in which the interaction between the micromechanical structures and electronics occurs by means of a single or differential capacitive sensors. The paper presents a new approach to the primary oscillation control system of the two-component micromechanical gyroscope. The method of calculating natural resonant frequency is based on measurements of the total current passing through the comb-driver actuator capacitances and the lock-in detection is suggested.

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IMEKO-TC10-2016-021.pdf

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IMEKO TC

TC10 - Measurement for Diagnostics, Optimization and Control

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