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UNCERTAINTY EVALUATION OF THE NANOINDENTATION SYSTEM

Jiong-Shiun Hsu, Chi-Shen Chang, Yu-Yi Su, Jeah-Sheng Wu, Sheau-Shi Pan

Abstract

In this paper, the uncertainty of nanoindentation system was evaluated. The laser interferometer and electronic balance were respectively adopted to calibrate the quantities of displacement and load of nanoindeantion system. The results reveal that the relative expanded uncertainty of indeantion hardness, <i>U</i><sub>H</sub>, is 8.1%. The relative expanded uncertainity of reduced modulus, <i>U</i><sub>Er</sub>, is 5.4%.

Keywords
uncertainty, nanoindentation system
Download
PWC-2006-TC5-009u.pdf
DOI
-
IMEKO TC
TC5 - Hardness Measurement

Event details

Event
XVIII IMEKO World Congress
Place
Rio de Janeiro, BRAZIL
Time
17 September 2006 - 22 September 2006
Website
http://www.metrologia2006.org.br

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