Three-Component Primary Vibration Calibration System at NIM

Chenguang Cai, Zhihua Liu, Ming Yang

Abstract

A three-component primary vibration calibration system had been set up in National Institute of Metrology, which consists of an air bearing three- component shaker, a sinusoidal three-component control system and a primary three-component vibration measuring system. A motion coupling device based on air bearing force transferring and motion guiding has been developed to simultaneously generate three-component vibration in the three orthogonal coordinates. The rectilinear, circular, and elliptical space motions have been realized by the sinusoidal three-component control algorithm. The three-component measuring system can simultaneously measure the three orthogonal motion quantities based on sine-approximation method.

Keywords

three-component shaker, primary vibration calibration, sensitivity, interferometry

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IMEKO-TC22-2017-003.pdf

DOI

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IMEKO TC

TC22 - Vibration Measurement

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