Pico-Meter Metrology for the Primary Vibration Calibration

Wan-Sup Cheung, Kyungmin Baik

Abstract

This paper introduces the use of a homodyne differential plane mirror interferometer (HDPMI) for development of the primary vibration calibration system. The zero-drift test results showed that it enables displacement measurement in a scale of 10 pico-meters could be feasible. The HDPMI model was shown to be quite successful for the primary vibration calibration even in the frequency range of 5 kHz to 20 kHz. The standard uncertainty of the complex sensitivities from 5 kHz to 20 kHz was to be less than 0.46 % for their moduli and 0.57° for the phase shifts.

Keywords

vibration, primary calibration, laser interferometer, pico-meter metrology

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IMEKO-TC22-2017-005.pdf

DOI

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IMEKO TC

TC22 - Vibration Measurement

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