Analysys and Protocol for Characterizing Intrinsic Properties of Three-Axis Mems Accelerometers Using a Gimbal Rotated in The Gravitational Field

Michael Gaitan, Muhammad Yaqub Afridi, Jon Geist

Abstract

Three-axis MEMS accelerometers are typically characterized in terms of their cross-sensitivity matrix. We present an analysis and protocol to characterize them in terms of their intrinsic properties, which we define as the responsivity of each accelerometer along its axis of maximum response in a gravitational field and the angles between each of these axes. An analysis and test protocol is developed to determine these properties using a gimbal to rotate each axis of the device orthogonally to the gravitational field. We propose that this approach is better suited for laboratory inter-comparisons.

Keywords

MEMS, microelectromechanical systems, accelerometer, intrinsic, calibration

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IMEKO-TC22-2017-015.pdf

DOI

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IMEKO TC

TC22 - Vibration Measurement

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