Assessment of the Mems Accelerometer Calibration by Using the Very Low Frequency Primary Vibration Calibration System with Wireless Transmission

Sheng-Han, Wang, Kuang-I, Chang, Yu-Chung Huang

Abstract

The very low frequency primary vibration calibration system in Taiwan has been improved. In order to provide local semiconductor foundry a more reliable way to calibrate the MEMS accelerometer, three kinds of accelerometers that are ADXL, PCB 356A15 and QA3000 were tested via such vibration calibration system. Unlike PCB 356A15 and QA3000, the MEMS type accelerometer, ADXL, was only performed well under 100 Hz. All the three kinds of accelerometers were connected to NI wireless modules in order to reduce the inconvenience of wires during vibration monitoring. The result suggests that we shall use MEMS accelerometer with the vibration under 100 Hz.

Keywords

primary vibration calibration, MEMS accelerometer, accelerometer wireless

Download

IMEKO-TC22-2017-018.pdf

DOI

-

IMEKO TC

TC22 - Vibration Measurement

Back to the proceedings