ABSOLUTE CALIBRATION OF A FIZEAU INTERFEROMETER WITH A LIQUID PLANE

G. Ruiz, A. Gamboa, B. Valera, R. Nava

Abstract

The calibration process of a Fizeau interferometer using a liquid reference plane in an accredited secondary laboratory is presented. Influence factors involved, mainly vibration effects, are considered. The interferograms obtained, are then processed by two means: with self- developed software, based on mathematical morphology theory; and with free available web software. For validation, the results of measurement are compared with two previous calibrations made with commercial interferometers. An uncertainty of 26 nm is associated to the calibration process.

Keywords

absolute calibration, liquid plane, Fizeau interferometer, traceability

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PWC-2006-TC8-017u.pdf

DOI

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IMEKO TC

TC8 - Traceability in Metrology

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