Design of ATE Calibration Device Based on Microelectric Reference Materials

Yong Hu, Yulin Li, Qian Liu

Abstract

Microelectronic Reference materials (RMs) are a good way to achieve microelectronic traceability. To achieve full calibration of Automated Test Equipment(ATE), each test channel should be traced to calibration device of ATE based on RMs. This paper puts forward a design solution of calibration device of ATE based on RMs, which can realize the versatility and portability of calibration device, and realize automatic calibration progress.

Keywords

ATE, calibration, reference materials

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IMEKO-TC4-2019-053.pdf

DOI

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IMEKO TC

TC4 - Measurement of Electrical Quantities

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