Development of small weighing system for liquid microflow

R. Doihara, K. H. Cheong, T. Shimada, N. Furuichi

Abstract

A prototype small weighing system for liquid micro-flow from 10 mL/min down to 1 μL/min has been constructed. The calibration method was the static weighing with standing start and stop. The weighing system was set in a constant temperature and humidity chamber. At small flow rates, evaporation effect comes to be a significant error source. In order to reduce evaporation error, a detachable system between a weighing tank and a pipe line has been developed. The detachable device prevents pipeline tension to the weighing scale and is able to keep the pipeline closed while collection. Performance of the weighing system was evaluated by analysis of calibration factors to a syringe pump. At a preliminary test, the collected liquid was from 0.2 g to 2 g of water. In the preliminary test, the evaporation error was estimated to be below 0.1 % down to 2 μL/min of water. The system is aiming to use at calibrations of liquid micro-flow meter for the semiconductor industry and the medical field.

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IMEKO-TC9-2019-076.pdf

DOI

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IMEKO TC

TC9 - Flow Measurement

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