Fundamental study for developing the nano-CMM with a micro probe based on optical force dynamics

Y. Takaya

Abstract

In this paper, the dynamic properties of the optically vibrated microprobe for establishing the nano-CMM are presented. The principle of the position detection probe is based on the single-beam gradient-force optical trap of a micrometer size probe sphere and the vibration probing technique. A novel principle of position sensing using the phase delay response due to drastically increasing viscous drag coefficients near the surface is proposed. Fundamental measurement of the phase delay is demonstrated by probing the edge of an as-cleaved silicon wafer in the lateral direction. The measurement results of corner edge profile of an as-cleaved silicon wafer suggest that the proposed method is valid for sensing a position with the resolution of nanometer order.

Keywords

vibrating microsphere; viscous drag coefficient; laser trapping; probing technique; nano-CMM

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IMEKO-TC14-2007-04.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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