HYBRID TYPE SURFACE THERMOMETER

Tohru Iuchi, Kensuke Hiraka

Abstract

A hybrid-type surface thermometer combines the contact and non-contact methods, which allows us to overcome the shortcomings of both methods. The hybridtype surface thermometer is a modified radiation thermometer. Temperature measurement using this thermometer is possible within a random error of ±0.5 K at temperatures of around 1000 K. This thermometer provides a useful means for calibration of in-situ temperature measurement in various processes, especially in the semiconductor industry. This paper introduces the basic idea of the hybrid-type surface thermometer, presents experimental results and discussions, and finally describes an application.

Keywords

radiation thermometry, thermal contact resistance, metal film, emissivity, semiconductor wafer

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PWC-2006-TC12-007u.pdf

DOI

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IMEKO TC

TC12 - Temperature and Thermal Measurements

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