First results on the functional characterization of two rotary comb-drive actuated MEMS microgripper with different geometry

Gabriele Bocchetta, Giorgia Fiori, Andrea Scorza, Nicola Pio Belfiore, Salvatore Andrea Sciuto

Abstract

Microgrippers (MGs) are Micro Electro-Mechanical System (MEMS) devices able to manipulate cells and micrometric objects. In order to carry out their functional characterization, a comparison between two electrostatic rotary combdrives actuated prototypes with different geometries through an image analysis-based method is proposed. This study aims at evaluating and comparing the MGs displacement as a function of the supply voltage. The two investigated geometries are equipped with a single rotary comb-drive and a double rotary comb-drive actuation. MGs data have been collected through a trinocular optical microscope with a digital camera and processed by means of an algorithm implemented ad hoc in MATLAB. Based on the promising results obtained, further studies are going to be carried out by including other geometries and improving the experimental setup and implemented method.

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IMEKO-TC4-2022-28.pdf

DOI

10.21014/tc4-2022.28

IMEKO TC

TC4 - Measurement of Electrical Quantities

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