FRESNEL MEASURING METHOD FOR DIMENSIONAL INSPECTION

Yuri Chugui, Nikolai Yakovenko, Michael Yaluplin

Abstract

Accuracy characterization of a Fresnel method for objects dimensions measurement in coherent and partially coherent light is investigated. The major sources of a systematic measurement error are estimated analytically including non-uniform illumination of the object, the interference effect of the diffraction object edge images, the integration properties of the linear multi-element photodetector, influence of extended size of partially coherent light source. Effective algorithms for account of basic error components and for increase accuracy in low measuring range are proposed. The obtained results are confirmed by experiments.

Keywords

dimensional inspection, Fresnel diffraction

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PWC-2006-TC14-007u.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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