METROLOGICAL CHARACTERIZATION OF DIGITAL MEMS ACCELEROMETERS IN DYNAMIC CONDITIONS: AN INVESTIGATION OF LINEARITY IN AMPLITUDE AND TEMPERATURE EFFECTS

A. Schiavi, A. Prato, F. Mazzoleni, A. Facello, A. Kwitonda

Abstract

In several applications, such as industrial plants monitoring, or peculiar manufacturing process, the sensors are subjected to a wide range of acceleration amplitude levels or shocks, as well as thermal changes, that could affect the micro electro-mechanical inner parts, altering their performance and reliability. In this work, by applying a calibration procedure developed at INRIM, the main sensitivity of digital MEMS accelerometers is evaluated, as a function of amplitude, in the frequency domain. Moreover, a survey of temperature drift, from -20 °C up to 80 °C, is also performed, to characterize the suitability of digital MEMS accelerometers for actual applications.

Keywords

digital MEMS accelerometer; calibration; amplitude; thermal effects

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IMEKO-TC22-2022-033.pdf

DOI

10.21014/tc22-2022.033

IMEKO TC

TC22 - Vibration Measurement

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