MINUTE FORM MEASURING SYSTEM

Kazuhiro Ishizu, Akihito Takahashi, Tomoyuki Miyazaki, Kentaro Nemoto

Abstract

According to the progress of industrial products, high-accuracy and minute parts are increasing rapidly. As one of the desired measuring systems for accurately and efficiently evaluating the 3D form of these mass-production minute form parts, an evaluation system constructed by combining "a high-accuracy stage", "minute probes" and "an optical unit" is described.

Keywords

Measuring instrument, Minute form measurement, Probe, Low measuring force

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PWC-2006-TC14-027u.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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