DESIGN AND FABRICATION OF NANOMETRIC LATERAL SCALE CONSISTING OF GaAs/InGaP SUPERLATTICE

Ichiko Misumi, Satoshi Gonda, Osamu Sato, Kentaro Sugawara, Kazunori Yoshizaki, Qiangxian Huang, Tomizo Kurosawa, Toshiyuki Takatsuji

Abstract

Nanometric lateral scales with 25 nm pitch using GaAs/InGaP superlattice were designed and fabricated for realization of the-smallest-pitch-CRMs. The pitch of the scales was measured by a nanometrological AFM and uncertainty in pitch measurements was evaluated. The quality of the developed scales as CRMs was verified.

Keywords

nanometrology, pitch, CRM

Download

PWC-2006-TC14-031u.pdf

DOI

-

IMEKO TC

TC14 - Measurement of Geometrical Quantities

Back to the proceedings