CANTILEVER STRUCTURES FOR MEASURING MICROSTRUCTURED SURFACES OF MACRO AND MICRO COMPONENTS

Michael Balke, Erwin Peiner, Lutz Doering

Abstract

In this paper we present a new type of silicon micro cantilever structures with integrated tips for measuring microstructured surfaces. Results of FEM simulation and calibration results will be discussed. Also the fabrication of the structures and the fabrication of the tips are described.

Keywords

cantilever, silicon bulk micromachining, piezoresistive strain gauge

Download

PWC-2006-TC14-032u.pdf

DOI

-

IMEKO TC

TC14 - Measurement of Geometrical Quantities

Back to the proceedings