CONSTRUCTION AND EVALUATION OF A TRACEABLE METROLOGICAL LONG RANGE SCANNING TUNNELING MICROSCOPE

Albert Weckenmann, Jörg Hoffmann

Abstract

Based on a commercial laser interferometrically controlled long-range nanopositioning unit a traceable metrological STM with a range of 25 mm · 25 mm · 5 mm and a resolution up to 0.1 nm has been designed, set-up and tested. Design objectives of the custom made STM probing system were low noise and high thermal and mechanical stability to enable for time consuming large area scans.<BR />
As the nanopositioning stage is capable of traceable position measurement the probing system is used in compensation method, i.e. minimizing the effective measuring range of the sensor so that the length measured untraceably by the sensor is negligible compared to the lengths measured traceably by the interferometers.

Keywords

STM, coordinate metrology, multisensorics, nano technology

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PWC-2006-TC14-033u.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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