MODULARIZED MODELING OF MEASUREMENT PROCESSES IN MICRO- AND NANOMETROLOGY FOR MEASUREMENT UNCERTAINTY EVALUATION

Albert Weckenmann, Thomas Wiedenhoefer

Abstract

Measurement uncertainty characterizes the quality of a measurement result. It is determined according GUM by modeling the measurement process with all effective influences. Compared to conventional measurement processes detailed models in micro- and nanometrology are not yet sufficiently published due to ongoing research on influences and correlations. In the paper the modeling background according GUM is shown and research results and a demo application in modularization of measurement processes in micro and nanotechnology will be presented.

Keywords

metrology, uncertainty, modeling

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PWC-2006-TC14-035u.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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