A NEW VECTORIAL MODEL FOR THE ESTIMATION OF UNCERTAINTY IN NANO COORDINATE

R. Füßl, G. Jäger, R. Grünwald, I. Schmidt

Abstract

Nano coordinate measuring machines (NCMMs) are technological devices enabling the positioning, touching and measuring of centimetre-sized objects with nanometre precision. When using such measuring machines the specification of measurement results requires the expression of uncertainty of measurement. This paper describes a concept for the expression of three- dimensional uncertainty of NCMMs based on a vectorial metrological model. By means of a modular model approach submodels can be easily included in the metrological main model. Furthermore, cross-coupling effects arising between the measuring axes can be taken into account. The described model provides a basis for the expression of uncertainty according to the Guide to the Expression of Uncertainty in Measurement (GUM) or by means of the Monte- Carlo-Method. The results of the uncertainty analysis are shown for a special example of a vectorial model.

Keywords

Nanometrology, uncertainty of nano coordinate measuring machines, vectorial metrological model

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PWC-2006-TC14-034u.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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