INVESTIGATION OF DYMANIC PROPERTIES OF LINE SCALE CALIBRATION SYSTEMS

Saulius Kaušinis, Aurimas Jakštas, Rimantas Barauskas, Albinas Kasparaitis

Abstract

The paper addresses the error-related problems specific to line scale calibration in dynamic mode of operation that are caused primarily by geometrical and thermal deviations of the calibration system components. A new 3D finite element model has been developed in order to both investigate thermo-mechanical processes in the comparator structure and evaluate possible temperature influence on geometrical dimensions of the line scale. An interferometer-controlled comparator setup with a moving microscope has been designed to evaluate the performance of the long scale calibration process.

Keywords

line scale calibration, FE modelling

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PWC-2006-TC14-045u.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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