First results on torque estimation by FEA and experimental analysis in a novel CSFH-based microgripper

Gabriele Bocchetta, Giorgia Fiori, Federico Filippi, Pietro Ursi, Salvatore Andrea Sciuto, Andrea Scorza

Abstract

Microgrippers (MGs) are MEMS devices that can manipulate cells and microscopic objects. In this work an approach based on both experimental and a finite element analysis is proposed with the aim of evaluating the torque exerted by the micro-actuator of a novel prototype of MG equipped with electrostatic rotary comb-drives and Conjugate Surface Flexure Hinges (CSFHs) when powered by a 0-20 V peak-topeak supply voltage. The angular displacement of the micro-actuator has been measured using an image analysis method implemented by the Authors from videos acquired by a camera on a trinocular optical microscope, while the hinge stiffness has been estimated using numerical simulations: the obtained results show that the comb-drive can apply a maximum torque of 1.4 ± 0.2 nNm.

Keywords

torque estimation, FEA, CSFH microgripper

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IMEKO-TC4-2023-42.pdf

DOI

10.21014/tc4-2023.42

IMEKO TC

TC4 - Measurement of Electrical Quantities

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