Bayesian approach for determining the optical constants of layered systems using EUV reflectometry: The effect of different priors

O. Henze, V. Soltwisch, A. Tiwari, I. A. Makhotkin, N. Hegemann, S. Heidenreich

Abstract

<p>For the development of novel technologies and high-precision manufacturing techniques in semiconductor and optics industries and in nanotechnologies, precise knowledge of the optical properties of these materials is vital, providing the foundation e.g. for novel nanoelectronic devices, high-quality sensors or effective photovoltaic elements.</p>

Keywords

semiconductor, optics industries, nanotechnologies, optical properties of materials, novel nanoelectronic devices, effective photovoltaic elements

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IMEKO-TC10-2023-019.pdf

DOI

10.21014/tc10-2023.019

IMEKO TC

TC10 - Measurement for Diagnostics, Optimization and Control

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