Optimization of SnO2 thin films for low temperature NO2 sensors applications
Abstract
In this work, a high-performance n-type semiconductor gas sensor based on undoped-SnO<sub>2</sub> thin films deposited by a conventional radio- frequency (RF) – magnetron sputtering process was successfully fabricated. The structure, morphology, and chemical composition of the sensing material were investigated using X-ray diffraction (XRD), Atomic Force Microscopy (AFM), and X-ray photoelectron spectroscopy (XPS) respectively. The end results show that the thin film has a poly- crystalline structure with the presence of oxygen vacancies. The resistive sensor architecture has been simulated using TCAD SILVACO software’s in order to optimize the geometry for sensor response optimization. <BR />In this study, undoped-SnO<sub>2</sub> resistive gas sensor exhibits compelling sensing performance for detecting 3 ppm of NO 2 mixed with dry air at low operating temperature, around 100°C. 3 ppm represents the maximum level of NO<sub>2</sub> concentration beyond which short-term exposure presents a risk to human health or environmental degradation. Lower concentrations were also investigated in our study and the lowest NO<sub>2</sub> concentration evaluated is about 0.25 ppm.
Event details
- Event
- TC19 Symposium: Metrology on Environmental Instrumentation and Measurements (EnvIMEKO 2022)
- Technical Committee
- TC19
- envimeko.lemans.2022@gmail.com
- Place
- La Mans, FRANCE
- Time
- 2 June 2022 - 3 June 2022
- Website
- https://easychair.org/cfp/EnvIMEKO_2022