The cantilever micro-beam behavior for environment check

V. Elias, A. Rabih, F. Braud, P. Champagne, G. Nassar

Abstract

In this paper, a new model of a vibrating micro- cantilever is presented, which can be heavily utilized in a microelectromechanical system (MEMS). With our new prototype, several risks associated with the previous means are eliminated, and the rheological sensation is enhanced. The cantilever beam is made out of silicon (Si) engraved by a laser etching machine in an exponential shape ending with a thin array of eight cantilevers with a size of (500 x 140 x 10) µm³. Based on the behavior of the natural frequency, it is possible to estimate the variation of the density of a fluid or the presence of markers in a gas or liquid. To select the target analyte, it is necessary to identify the binding site as well as the covalent or noncovalent interactions between the functional monomer and the analyte. It can monitor natural, industrial, and residential areas by analyzing the eigenfrequency change when the micro-beam is immersed in a sample of these mediums. The numerical analysis using COMSOL Multiphysics software conducted was based on theoretical computations. The frequency resolution of the self-sensing micro-cantilever achieved in the fluid is 50 Hz/mmol.L_-1 with mode 7th around 1.14 MHz However, we have noticed that this device can detect changes in density up to 0.054 %.

Keywords

Environment; Rheology; Eigenfrequency; Adsorption particles

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IMEKO-TC19-2022-11.pdf

DOI

10.21014/tc19-2022.11

IMEKO TC

TC19 - Environmental Measurements

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