EXPERIMENTAL AND NUMERICAL CHARACTERIZATION OF XY PIEZOELECTRIC NANOPOSITIONERS

Gilder Nader, Ronny Calixto Carbonari, Emílio Carlos Nelli Silva

Abstract

XY nanopositioners consist of two piezoceramic actuating a compliant mechanism. Prototypes were manufactured in aluminum using a wire EDM process, and bonded to PZT5A. Finite element simulations were carried out using the commercial ANSYS software application. Experimental analyses were conducted using laser interferometry to measure displacement, while considering a quasi-static excitation.

Keywords

nanopositioners, MEMS, laser Interferometry

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PWC-2006-TC15-006u.pdf

DOI

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IMEKO TC

TC15 - Experimental Mechanics

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