Negative gauge pressure calibration methods using a PACE CM3 pressure controller

Tim Sparkes, Stefan Berdej, Christopher Roberts, Neculai Moisoi

Abstract

The development of pressure controllers has seen a great focus and their technical characteristics have improved over the last few decades, specifically in terms of their metrological capabilities. This advancement now makes them a suitable candidate to measure negative gauge pressure, either directly or in conjunction with other devices such as pressure balances. The Druck PACE in conjunction with CM3 (control module) has demonstrated performance characteristics in line with those required to complete negative gauge pressure calibrations. Three different calibration methods were developed within the Druck Ltd laboratory, from which two of them used a 200 kPa absolute pressure CM3, containing TERPS© (Trench Etched Resonant Pressure Sensor). The unit under test was a PACE1000 indicator built with a piezoresistive sensors with a pressure range from -100 to 100 kPa. The expanded uncertainty was evaluated for each method, as well as identifying the advantages and shortcomings of each method. As the calibrations were performed for gauge mode (not differential), the calibration range was -950 to -50 hPa.

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IMEKO-TC16-2023-03.pdf

DOI

10.21014/tc16-2023.03

IMEKO TC

TC16 - Pressure and Vacuum Measurement

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