FREQUENCY STABILIZED AND HOMODYNE LASER DIODE

Thanh Tung Vu, Yoshitaka Maeda, Masato Aketagawa

Abstract

A displacement measurement with an uncertainty of less than sub-nanometer is required in many industrial fields. A laser interferometer has become a powerful tool in nano-metrology, because the wavelength of the light source can be calibrated by meter definition. In this paper, we propose the use of sinusoidal phase (frequency) modulation on a laser diode (LD) to achieve both the frequency stabilization of the LD and a displacement measurement by a homodyne interferometer.

Keywords

frequency stabilization, laser diode, iodine, homodyne interferometer

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DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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