MULTI-READING HEAD CYLINDRICAL GRATING ANGLE ERROR COMPENSATION BASED ON HARMONIC ANALYSIS
Abstract
On high precision one-dimension turntable, an angle measuring system was built with the cylindrical grating and uniform multi-reading head. Based on high precision multi-mirror polyhedron with autocollimator, angle measurement error was obtained. Then, the angle measuring error was analyzed by FFT, the compensation mechanism of multi- reading head was analyzed in detail. Each order of the angle error was compensated by using the harmonic analysis method, and sources of angle error were exposed. The experimental results show that the multi-reading head cylinder grating sensor angle measuring accuracy up to the ±0.7" after the compensation, which proves the feasibility of the system and compensation method.
Event details
- Event
- TC14 LMPMI Symposium 2014
- Technical Committee
- TC14
- Place
- Tsukuba, JAPAN
- Time
- 3 September 2014 - 5 September 2014
- Website
- http://www.lmpmi2014.jp/