Masaki Michihata, Ayano Fukui, Kenji Maruno, Terutake Hayashi, Yasuhiro Takaya
We newly propose the optical micro-coordinate measurement technique based on the fluorescent signal. Surface position is detected based on fluorescent signal emitted from surface of structures by means of the confocal optical detection. Stimulated fluorophore emits fluorescence over wide angular ranges, allowing the confocal microscope to gather the fluorescent signal from steep surface (even from vertical sidewall). Thus this optical method is expected to measure three-dimensional shapes of smaller structures than 100 µm. Previously we reported the detection capability of a vertical surface...
TC14 LMPMI Symposium 2014
· TC14
· 2014
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Yu. V. Chugui, A. G. Verkhoglyad, P. S. Zavyalov, E. V. Sysoev, R. V. Kulikov, M. A. Zavyalova, A. G. Poleshchuk, V. P. Korolkov
Modern industry and science take novel 3D optical measuring systems and laser technologies with micro-/nanometer resolution for solving actual problems. Such systems, including the 3D dimensional inspection of ceramic parts for electrotechnical industry and 3D superresolution low-coherent micro-/nanoprofilometers are presented. New approach for the formation of 3D laser templates for large-sized objects such as antennas using diffractive optics is presented. The newest results in the field of laser technologies for high-precision synthesis of microstructures by updated image generator using...
TC14 LMPMI Symposium 2014
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· 2014
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Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu
This paper proposes non-contact pulse interferometer for dimensional metrology using the repetition frequency of the optical frequency comb. The repetition frequency of 100 MHz of a general optical frequency comb is transferred to that of 1 GHz by using a Fabry-Pérot Etalon, which is firstly developed by single mode optical fiber. Therefore, temporal-coherence interference fringes are generated at each several cm and then compact absolute position- measuring system is realized for practical non-contact use with a high accuracy measurement. The stability and accuracy of measurements are...
TC14 LMPMI Symposium 2014
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· 2014
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Guanhao Wu, Luofeng Shen, Kai Ni, Weihu Zhou, Qian Zhou
A dual-comb-based distance measurement method is proposed, which can measure the optical distance of the fundamental and the second harmonics simultaneously, so that two-color method can be applied to correct the refractive index of air. In a 1.6 m long distance measurement, the stability is about 10 µm. In the step-by-step linear test with a range of 1.2 m, the measurement accuracy is demonstrated to be about 20 µm. The results show the present method can be applied in practical distance measurement.
TC14 LMPMI Symposium 2014
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· 2014
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Milena Astrua, Marco Pisani, Massimo Zucco
At INRIM a novel absolute long distance interferometer has been developed for application in space missions. The interferometer has been successfully tested for long distance measurements in air. Main limitation of such measurements is the knowledge of refractive index of air which in turn is mainly affected by air temperature. A method to measure average air temperature based on the measure of the speed of sound has been developed and combined with the absolute interferometer achieving measurement uncertainties less than 1 ppm in open air up to a 78 m distances.
TC14 LMPMI Symposium 2014
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· 2014
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Tze-An Liu, Yi-Chen Chuang, Hau-Wei Lee, Jin-Long Peng
Dual-comb based absolute distance measurement techniques, are attractive because they can scan an entire range window quickly, and requiring no balancing of interferometer paths. We describe a gold coated glass cover plate based dual compact and repetition rate difference tunable free running fiber laser comb based LIDAR (light detection and ranging) system. One end of the laser cavity is butt-coupled with a cover glass plate that coated with 35 nanometers of gold as out coupler, and the other is with a SAM for the mode-locking and high reflection. The difference in repetition rate is tuned...
TC14 LMPMI Symposium 2014
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Hirokazu Matsumoto, Kiyoshi Takamasu
Optical frequency comb has various characteristics such as short pulse, broad spectra, many spectral lines, and high temporal coherency. In this present, new absolute length-measuring technique with a high resolution of 0.1 µm is developed by using temporal-coherence interferometry of optical comb and a short translation stage for various length ranges. A new fiber Fabry-Perot etalon of a free spectral range of a frequency of 15 GHz is developed for improving the fine positioning in space. Moreover, interference-fringe-peak is automatically achieved by developing a new analog electric...
TC14 LMPMI Symposium 2014
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Marco Pisani, Alessandro Balsamo, Claudio Francese
A novel paradigm of coordinate measurement is presented, named InPlanT. The target application is the industrial measurement of large workpieces in harsh conditions, e.g. in aerospace industry. Like other techniques, a large measuring volume is covered by laser light with no contact. Unlike most other techniques, InPlanT relies on light only to point to a target, while the actual measurement is done by standard position sensors, such as linear encoders or interferometers. The actual coordinate measurement is relegated to the border of the measuring volume, possibly protected against a harsh...
TC14 LMPMI Symposium 2014
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Faheem Mohammad, Syed Fazil, Luai M. Al-Hadhrami
Surface plate characteristics influence the calibration of artifacts, instruments, working gauges and, by extension, the quality of manufactured parts. Industrial surface plates are calibrated periodically. Moody or Union Jack Method is applied to calibrate the surface plate alongside the application of latest laser equipment. This procedure necessitates sophisticated tooling and the pertinent calibration sequence to obtain the reliable results. In this method, the residual height at each position on the surface is expressed in terms of measurement parameters. A statement of uncertainty for...
TC14 LMPMI Symposium 2014
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Karl J. Lenz
The majority of industrial surfaces is optically not cooperative and is difficult or not possible to be measured optically. This forces customers to use slow tactile measurement methods. Today surfaces are made optically cooperative by spraying some powder. This method is not economical (takes additional preparation time) and is not accurate (the sprayed layer thickness is unknown). The presentation will explain how optically non cooperative industrial parts can be conditioned for optical high accurate, high speed measurements. The presentation will explain the conditions for the expected...
TC14 LMPMI Symposium 2014
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· 2014
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