Dong Wei, Masato Aketagawa
The national standard of length in Japan changed from the iodine-stabilized He–Ne laser to a femtosecond optical frequency comb (FOFC) in 2009. This means that there are different frequencies and their combination, adjacent pulse repetition interval length (APRIL), which can be used as a scale since an FOFC is a phase-coherent combination of several hundreds of thousands of wavelengths. Thus, the following questions arise naturally: Which parameters can be used as a scale? What are their characteristics? The goal of this paper is to answer these questions. We show the similarity and the...
TC14 LMPMI Symposium 2014
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· 2014
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Mariko Kajima, Tsukasa Watanabe, Makoto Abe, Toshiyuki Takatsuji
A calibrator for 2D grid plate based on a commercial vision coordinate measuring machine (vision-CMM) was developed. A laser interferometer for calibration of x coordinate and two laser interferometers for calibration of y coordinate were attached on the vision-CMM. By applying multi step measurement method for the calibration procedure, the dimensional error in the calibrator could be reduced. The calibration uncertainty for 2D grid plate using developed calibrator could be estimated as sub-micrometer level.
TC14 LMPMI Symposium 2014
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Chen Wang, Jian Bai, Qian-Bo Lu, Guo-Guang Yang
This paper discusses the analysis and optimization of a novel optomechanical zeroth-order grating transducer based on an anomalous diffraction phenomenon, namely Wood’s type anomaly, in which tiny changes in the displacement of the nanostructured grating elements lead to a dramatic increase or decrease of the optical reflection amplitude. With this special feature, this structure is an ideal sensor component to observe very small displacement. This device is very sensitive to wavelength, the period and the width of the grating. Here, we analyze the performance of the structure with different...
TC14 LMPMI Symposium 2014
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Qianbo Lu, Wenxiu Lian, Shuqi Lou, Chen Wang, Jian Bai, Guoguang Yang
In this paper, an improved MOEMS accelerometer is described, which is based on integrated grating with phase modulation. This device is composed of a laser diode, an optoelectronic processing circuit and a sensing chip consisted of a piezoelectric translator, an integrated grating as a reflective mirror on a transparent substrate and a mechanical part of a bulk silicon proof mass suspended by four cantilevers whose upper surface acted as another mirror. This device generates a series of interference fringes by two diffracted beams when illuminated with coherent light, whose intensities are...
TC14 LMPMI Symposium 2014
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Tomohiro Takada, Shin Usuki, Kenjiro T. Miura
In recent years, high-resolution microscopy using structured illumination has been practically applied for fluorescent bio-imaging. However, there is a large amount of speckle noise in reflected- and scattered-light images, because structured illumination is typically generated by laser-beam interference. Hence, this high-resolution imaging technique cannot be effectively used in industrial applications. In this study, we attempted to generate structured illumination using two-beam interference of low-coherence light, and to develop a high-resolution and low-speckle imaging technique for...
TC14 LMPMI Symposium 2014
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Hiromichi Murata, Ryohei Seya, Tatsuya Oku, Miyu Ozaki, Ryoshu Furutani
Optical energy propagates along the metal surface as collective oscillations of free electrons when optical waves are irradiated with the resonant condition. The oscillations with electrical fields are called surface plasmon polaritons (SPPs). SPPs are applied to sensors since excitation condition of SPPs sensitively responses to refractive indices. Here, using SPPs, a flow of a liquid-liquid two-phase fluid is visualized, and a flow-rate distribution is derived. A channel is made on the silver-film surface deposited on a slide glass, and filled with ethanol-aqueous solution. In this...
TC14 LMPMI Symposium 2014
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Ichiro Ogura, Kiwamu Ashida, Jun Akedo
In order to realize efficient high-mix low-volume production, improvement of yield rate by reducing production flaw is important technique. Manufacturing of touch panel display with large scale wiring board is a typical example of the high-mix low-volume production. AIST has proposed Laser assisted Ink-Jet printing (LIJ) technology, which can repair the flaw of circuit with silver nanoparticle ink. To establish in-process repairing system for touch panel display, a first production flaw detecting system is demanded with combining to the LIJ technology. Therefore, the aim of this study is to...
TC14 LMPMI Symposium 2014
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F. Härtig, B. Müller, K. Wendt, M. Gahrens, M. Franke, H. Delpy, A. Forbes, I. Smith
Numerical algorithms used in metrology can be online validated based on testdata and corresponding reference results in order to improve the reliability of measurement results. An established realization of the online validation is named Traceability for Computationally-Intensive Metrology (TraCIM). It allows service user to validate their software at the point of use. The service is operated by European national metrology institutes (NMIs). TraCIM is based on three pillars, the technical implementation, the legal aspects, and the commercial requirements. The technical implementation...
TC14 LMPMI Symposium 2014
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Hiroki Shimizu, Atsuo Ogawa, Yoshinori Sasaki, Yuuma Tamaru
To develop a micro tactile probe used with a micro coordinate measuring machine (CMM), a novel technique for detecting a three dimensional displacement of a small sphere with high sensitivity has been proposed. In this technique, a surface of a metal sphere is included as a spherical mirror in an optical system and changes of optical path arise from displacement of the sphere is detected with a sort of the astigmatic method. In the optical system, three eccentric collimated beams are generated and each beam moves parallel to the optical axis. The beam is converted to spherical wave by an...
TC14 LMPMI Symposium 2014
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A. Wedmann, K. Kniel, T. Krah, F. Härtig
To an ever-increasing extent, the constantly progressing miniaturization of components requires a constantly decreasing size of complex internal microstructures such as internal microthreads. These are used in large numbers, among other things in the clock industry and in medical engineering. At the same time, these workpieces are allowed to show only very small tolerances. Thus, it is indispensable to carry out measurements in parallel to the manufacturing of the parts. However, reliable quality assurance for these internal microstructures has been impossible so far. To overcome this...
TC14 LMPMI Symposium 2014
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