Ichiko Misumi, Kazuya Naoi, Kentaro Sugawara, Satoshi Gonda
Surface roughness measurements are sometimes performed using an atomic force microscope (AFM) in order to evaluate conditions of thin film fabrication and of material surface treatment. Recently precise and reliable surface roughness measurement has been required in order to further improve quality of both thin films and material surfaces. Evaluation method of AFM tip shape is a key technology in the surface roughness measurement using an AFM. An evaluation method of AFM tip shape using a probe examination sample and its evaluation criteria are stipulated in the Japan Industrial Standard...
TC14 LMPMI Symposium 2014
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· 2014
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Keishi Kubo
Recently the demand of the metrology for large asphere and freeform optics are increasing for digital camera and other area. We have developed new technology having the accuracy is less 0.1 um and scanning speed is 30 mm/s using the linear motor and the air bearing system based on the He-Ne stabilized frequency laser coordinate measurement system. By using this technology, we developed form measurement machine UA3P-650H, having larger measurement area XY 500 mm and Z 120 mm for asphere and freeform surfaces. When we think about asphere and freeform measurement, the form accuracy is needed...
TC14 LMPMI Symposium 2014
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Bart Boeckmans, Min Zhang, Frank Welkenhuyzen, Wim Dewulf, Jean-Pierre Kruth
Laser line scanning is a laser based measurement method to acquire dimensional information of a workpiece. The most common applications are found in e.g. automotive and medical industry. The advantages of laser line CMM probing are a high data density and a high measurement speed. This makes the probe ideal to measure three dimensional free form surfaces. To align freeform parts in a precise manner however, features (e.g. cylinders, spheres) are used to allocate the position. The newest generation of laser line scanners can have an MPE P of below 10 µm. The first part of the paper presents a...
TC14 LMPMI Symposium 2014
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Ercihan Kiraci, Glen A Turley, Alex Attridge, Alan Olifent, Mark A Williams
Coordinate Measuring Machines (CMMs) are considered as the most accurate metrology equipment and are used widely in the manufacturing sector. Traditionally, touch trigger probes have been employed but more recently non-contact laser scanning sensors have been developed, offering potential advantages in terms of speed and number of points captured. Laser scanning is attracting significant interest from industry due to its ability to characterise complex, free-form surface geometries which are becoming common in the styling of automotive body panels. However, laser scanning sensors do not...
TC14 LMPMI Symposium 2014
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Yuki Shimizu, SungHo Jang, Wei Gao
This paper proposes a new optical measurement system for evaluation of a cutting edge profile of a diamond tool. The authors have developed a measurement method of edge contours of diamond tools, in which a micro laser probe scans along the tool edge contour to measure the deviation of the tool edge contour from the scanning path. For further precise tool edge contour measurement with the micro laser probe, the spot diameter of the laser probe needs to be stabilized during the scanning. The proposed optical measurement system includes an optical system for white light scanning interferometer...
TC14 LMPMI Symposium 2014
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Kenichi Hibino, Ryohei Hanayama, Kim Yangjin
Spherical concaves with high numerical apertures are required in industry for lithography optics in ultraviolet (UV) and X-ray wavelengths. Systematic error in the interferometric test of these surfaces are aberrations due to imperfect alignment, gravitational effect, geometrical effect of nonuniform phase shift, aberrations of converging optics, phase-shift nonlinearity, mechanical vibration, and so on. Gravitational deformation of a 4-inch spherical concave surface was measured in a vertical Fizeau interferometer. Aberrations caused by the deformation was separated and extracted from the...
TC14 LMPMI Symposium 2014
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Ryota Kudo, Kenya Okita, Kohei Okuda, Yusuke Tokuta, Motohiro Nakano, Kazuya Yamamura, Katsuyoshi Endo
We have developed a nanoprofiler using the normal vector. The aim is to measure the free-form or aspherical high-precision. Since this method does not use a reference surface, it may be possible to measure the free form with high accuracy. Reproducibility of sub nm has been achieved so far. With the aim of the reduction and the evaluation of uncertainty, the estimation of the systematic error is attempted. We investigated the effect of systematic error has on the measurement result by computer simulation. Comparing the experimental results with the results, systematic errors are estimated.
TC14 LMPMI Symposium 2014
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Duong Quang Anh, Tomokage Syunsaku, Masato Aketagawa
Recently, the resolution of length measurements based on optical interferometry reached sub-nanometer order. However, the accuracy of the optical interferometry is limited by the knowledge of absolute air refractive index. In this work, we have proposed a method to measure the absolute air refractive index by measuring the free-spectral-range and the resonance frequency of a Fabry-Perot cavity, whose inside is filled by vacuum and by air. During the air refractive index measurement, the geometrical length of the Fabry-Perot cavity must be constant in vacuum and in air. In this paper, a...
TC14 LMPMI Symposium 2014
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Hung-Lin Hsieh, Wei-Cheng Wang, Yu-Cheng Wang, Ju-Yi Lee
A wavelength-modulation heterodyne grating interferometry for two-dimensional displacement measurement is proposed. This technique has the advantages of heterodyne interferometry, grating-based interferometry, and Michelson interferometry. A heterodyne light beam is obtained from a tunable diode laser using the triangular wave modulating method. While the heterodyne light beam is normally incident into a transmission type grating, two detection parts for in-plane (IP) and out-of-plane (OP) displacement measurements will be obtained. The optical phase variations resulted from the moving...
TC14 LMPMI Symposium 2014
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Rostyslav Mastylo, Thomas Froehlich, Eberhard Manske
Big challenges in precision measurement technology nowadays lead to the creation and improvement of a big variety of optical and tactile probes. This development concerns a nanosensor system on the basis of a non-contact laser focus probe (base sensor) which presents high resolution and low uncertainty. Optical and mechanical probing methods are combined on the basis of a laser focus sensor, thus allowing the combination of various interactions between sensor and specimen. For these purposes, the deflection of the probing sensor (cantilever or stylus) is measured directly without contact...
TC14 LMPMI Symposium 2014
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· 2014
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